FeSiN films for it narrow track head have been studied utilizing ion b
eam reactive spattering method. By controlling both nitrogen Bow ratio
and substrate temperature, the low-Si-content FeSiN films with (112)
orientation were obtained. The magnetostriction was reduced by this or
ientation, and good soft magnetic properties appeared. The saturation
magnetic flux density of the films was 1.7T. The 7.5 mu m trackwidth F
eSiN heads showed good recording anal reproducing characteristics.