In this work, interdiffusion and grain isolation in Co/Cr films have b
een investigated by studying the dependence of the magnetic properties
on the substrate preheating temperature as well as on post-deposition
annealing processes. By choosing pure Co instead of Co-alloy, the pos
sibility of grain isolation caused by the segregation of solute atoms
from within the magnetic layer had been eliminated. It is found that b
oth post-deposition thermal annealing and substrate preheating can eff
ectively increase the isolation of the Co grains.