PERFORMANCE OF HARD DLC PROTECTIVE FILM PREPARED BY PECVD METHOD FOR THIN-FILM MAGNETIC DISK

Authors
IECHIKA K KOKAKU Y OOTAKE M ABE K TANI H INABA H
Citation
K. Iechika et al., PERFORMANCE OF HARD DLC PROTECTIVE FILM PREPARED BY PECVD METHOD FOR THIN-FILM MAGNETIC DISK, IEEE transactions on magnetics, 30(6), 1994, pp. 4134-4136
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied
Journal title
IEEE transactions on magnetics → ACNP
ISSN journal
00189464
Volume
30
Issue
6
Year of publication
1994
Part
1
Pages
4134 - 4136
Database
ISI
SICI code
0018-9464(1994)30:6<4134:POHDPF>2.0.ZU;2-X
Abstract
Performance of diamond like carbon (DLC) film prepared by PECVD method has been investigated as the protective film of rigid thin film disk. An in-line sputtering PECVD multilayer deposition system was used for preparation of disk samples. The disks were found to be superior to t hose disks with conventionally sputtered carbon films in many points s uch as high durability against CSS tests, smooth coverage over the irr egular points of magnetic layer, and as a result, good corrosion resis tance even at the thickness of 15 nm or less.