Tb-Fe-Co/Ta multilayers were deposited on plasma-free glass slide subs
trates by using a facing targets sputtering apparatus. The specimen fi
lms with very thin thickness of Ta layers less than 1 nm revealed nat
and sharp interfaces. The enhancement of Kerr rotation angle was incre
ased with decreasing thickness of paramagnetic Ta layer. The magnetic
interaction between Tb-Fe-Co layers were observed even in the multilay
ers with the thickness of Ta layers approaching 20 nm.