DC BIASED CAPACITANCE METHOD FOR MEASURING THIN-FILM MAGNETOSTRICTIONAND DELTA-EPSILON-EFFECT

This paper reports on a method for measuring magnetostriction, Young's modulus of a substrate or film, and Delta E with one apparatus. A sub strate with thin magnetic film deposited on it is in parallel with and cantilevered above a metal plate electrode, and they form a capacitiv e cell. The cantilever deflects due to own weight, applied electric an d magnetic fields, The small change of capacitance caused by this defl ection is measured by a sensitive capacitance bridge. Young's modulus, magnetostriction, and Delta E effect can be calculated by a theoretic al analysis with the measured deflection data.