SILICON MICROMACHINED 2-DIMENSIONAL GALVANO OPTICAL SCANNER

Authors
ASADA N MATSUKI H MINAMI K ESASHI M
Citation
N. Asada et al., SILICON MICROMACHINED 2-DIMENSIONAL GALVANO OPTICAL SCANNER, IEEE transactions on magnetics, 30(6), 1994, pp. 4647-4649
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied
Journal title
IEEE transactions on magnetics → ACNP
ISSN journal
00189464
Volume
30
Issue
6
Year of publication
1994
Part
1
Pages
4647 - 4649
Database
ISI
SICI code
0018-9464(1994)30:6<4647:SM2GOS>2.0.ZU;2-U
Abstract
A new two-dimensional galvano optical scanner realized by silicon micr omachining is proposed. To realize two-dimensional operation a silicon micromachined gimbal structure was introduced. It is possible to sens e rotational angle using electromagnetic coupling between driving coil and fixed detecting coil.