Epitaxial growth of Fe films on Si(100), Si(110), and Si(111) substrat
es was achieved by dc facing targets sputtering. Substrate dc bias was
found to be an important parameter to achieve epitaxial growth. Epita
xial films were-not obtained without ade substrate bias except those o
n Si(111) substrates. In-plane anisotropy energy for Fe(110) plane was
different from the bulk. Uniaxial anisotropy and magnetoelastic energ
y should beconsidered with magnetocrystalline anisotropy.