The monolithic integration of non-self-aligned AlGaAs/GaAs N-p-n and P
-n-p HBT's with selective OMVPE has been utilized to demonstrate a low
-power high-speed integrated injection logic (I2L) technology. Sevente
en-stage ring oscillators with a logic swing of 0.7 V exhibited a reco
rd delay of 65 ps per gate with power dissipation of 13 mW per gate fo
r a speed-power product of 850 fJ. This value was in excellent agreeme
nt with SPICE simulations based on extracted device parameters which p
redicted a speed-power product of 840 fJ. Additional simulations predi
cated 28-fJ speed-power product and more than a factor of 2 reduction
in gate delay with improved epitaxial design and use of submicrometer
emitters and self-aligned processing.