The transition region at the interface of GaAs/AlxGa1-xAs multilayers
grown by molecular-beam epitaxy is investigated on the (110) face usin
g scanning tunneling microscopy and spectroscopy. An interface region
of 2 to 3 unit cells is observed in the charge-density contours. The t
unneling spectroscopy data, on the other hand, yield a transition regi
on of 6 to 9 unit cells wide, as determined from the offset of the val
ence-band edge. The experimentally derived valence-band position compa
res well with theoretical calculations, provided the tip-induced elect
rostatic band bending in the semiconductor layers is taken into accoun
t.