INFLUENCE OF SUBSTRATE-TEMPERATURE ON MAGNETIC AND STRUCTURAL-PROPERTIES OF RF MAGNETRON-SPUTTERED CO-CR THIN-FILMS

The present paper describes the substrate temperature T-s dependence o n magnetic and structural properties of Co-21 at.% Cr thin films depos ited on the Coming glass substrate by RF magnetron sputtering. The pro perties of the samples, such as saturation magnetization M(s), in plan e squareness ratio S-parallel to, effective magnetic anisotropy field H-k', spectroscopic splitting factor g, and hcp (002) peak intensity I -002, were examined by vibrating sample magnetometer, Q-band (approxim ate to 33.9 GHz) ferromagnetic resonance measurements and X-ray diffra ctometry. Specially, the presence of the various ferromagnetic constit uents in Co-Cr thin films are examined by the ferromagnetic resonance studies. With increasing T-s from room temperature to 200 degrees C, S -parallel to increases from 0.08 to 0.56 but H-k' decreases from 2530 Oe to -3900 Oe. Also I-002 decreases with increasing T-s. It is summar ized that the perpendicular magnetic anisotropy and c-axis orientation of Co-Cr films are improved at lower substrate temperature.