PULSED-LASER DEPOSITION OF AMORPHOUS CO-FE-NI-SI-B THIN-FILMS

Soft magnetic multicomponent Co-Fe-Ni-Si-B thin films have been grown by pulsed laser deposition onto single-crystal sapphire and silicon su bstrate. The static hysteresis measurements for different substrate te mperatures are presented. Thin films with a coercive force smaller tha n 1 Oe were grown at substrate temperatures from 250 degrees C to 350 degrees C. X-ray diffraction measurements proved that the structure of films is amorphous. The surface morphology of grown thin films was ob served by scanning electron microscopy. The chemical composition of de posited films corresponds to the composition of bulk alloy.