NONEQUILIBRIUM IMPURITY DIFFUSION IN SILICON

Authors
BAGRAEV NT KLYACHKIN LE SUKHANOV VL
Citation
Nt. Bagraev et al., NONEQUILIBRIUM IMPURITY DIFFUSION IN SILICON, Semiconductor science and technology, 6(7), 1991, pp. 577-581
Citations number
8
Journal title
Semiconductor science and technology → ACNP
ISSN journal
02681242
Volume
6
Issue
7
Year of publication
1991
Pages
577 - 581
Database
ISI
SICI code
0268-1242(1991)6:7<577:NIDIS>2.0.ZU;2-O