PHYSICAL BEHAVIOR OF CDO FILMS PREPARED BY ACTIVATED REACTIVE EVAPORATION

Citation
C. Sravani et al., PHYSICAL BEHAVIOR OF CDO FILMS PREPARED BY ACTIVATED REACTIVE EVAPORATION, Semiconductor science and technology, 6(10), 1991, pp. 1036-1038
Citations number
12
ISSN journal
02681242
Volume
6
Issue
10
Year of publication
1991
Pages
1036 - 1038
Database
ISI
SICI code
0268-1242(1991)6:10<1036:PBOCFP>2.0.ZU;2-6