THE ELECTRON-BEAM-INDUCED WATER OXIDATION OF SINGLE-CRYSTAL SILICON

Authors
BENNETT SL WILLIAMS EM
Citation
Sl. Bennett et Em. Williams, THE ELECTRON-BEAM-INDUCED WATER OXIDATION OF SINGLE-CRYSTAL SILICON, Semiconductor science and technology, 6(11), 1991, pp. 1103-1105
Citations number
5
Journal title
Semiconductor science and technology → ACNP
ISSN journal
02681242
Volume
6
Issue
11
Year of publication
1991
Pages
1103 - 1105
Database
ISI
SICI code
0268-1242(1991)6:11<1103:TEWOOS>2.0.ZU;2-D