DEGRADATION-FREE ELECTRON-CYCLOTRON RESONANCE PLASMA-ETCHING OF INP

Authors
PEARTON SJ CHAKRABARTI UK PERLEY AP CONSTANTINE C JOHNSON D
Citation
Sj. Pearton et al., DEGRADATION-FREE ELECTRON-CYCLOTRON RESONANCE PLASMA-ETCHING OF INP, Semiconductor science and technology, 6(9), 1991, pp. 929-933
Citations number
23
Journal title
Semiconductor science and technology → ACNP
ISSN journal
02681242
Volume
6
Issue
9
Year of publication
1991
Pages
929 - 933
Database
ISI
SICI code
0268-1242(1991)6:9<929:DERPOI>2.0.ZU;2-4