OXYGEN RICH SIMOX

Authors
SCANLON PJ HEMMENT PLF REESON KJ ROBINSON AK KILNER JA CHATER RJ HARBEKE G
Citation
Pj. Scanlon et al., OXYGEN RICH SIMOX, Semiconductor science and technology, 6(8), 1991, pp. 730-734
Citations number
12
Journal title
Semiconductor science and technology → ACNP
ISSN journal
02681242
Volume
6
Issue
8
Year of publication
1991
Pages
730 - 734
Database
ISI
SICI code
0268-1242(1991)6:8<730:ORS>2.0.ZU;2-B