AN INSTRUMENT FOR CONTACTLESS LIFETIME MEASUREMENTS IN SEMICONDUCTOR LAYERS OF SILICON-ON-INSULATOR (SOI) MATERIALS

Authors
REHWALD W MORF R VONLANTHEN A
Citation
W. Rehwald et al., AN INSTRUMENT FOR CONTACTLESS LIFETIME MEASUREMENTS IN SEMICONDUCTOR LAYERS OF SILICON-ON-INSULATOR (SOI) MATERIALS, Semiconductor science and technology, 6(8), 1991, pp. 735-742
Citations number
18
Journal title
Semiconductor science and technology → ACNP
ISSN journal
02681242
Volume
6
Issue
8
Year of publication
1991
Pages
735 - 742
Database
ISI
SICI code
0268-1242(1991)6:8<735:AIFCLM>2.0.ZU;2-4