ATOMIC-FORCE MICROSCOPY OF HIGH-VELOCITY CLUSTER-IMPACT INDUCED NANOSTRUCTURES

Authors
VONBLANCKENHAGEN P GRUBER A GSPANN J
Citation
P. Vonblanckenhagen et al., ATOMIC-FORCE MICROSCOPY OF HIGH-VELOCITY CLUSTER-IMPACT INDUCED NANOSTRUCTURES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 122(3), 1997, pp. 322-324
Citations number
6
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
122
Issue
3
Year of publication
1997
Pages
322 - 324
Database
ISI
SICI code
0168-583X(1997)122:3<322:AMOHCI>2.0.ZU;2-U
Abstract
Beams of high-velocity clusters can be used for micromachining by reac tive accelerated cluster erosion (RACE), Atomic force microscopy of is olated impact-induced structures on Si or Pyrex glass reveals nanomete r scale elevations instead of craters, pointing at transient localized melting of the target material.