MOLECULAR-DYNAMICS SIMULATION OF THE INTERACTION OF ENERGETIC CLUSTERS WITH THIN-FILMS

Authors
KANG X WILLE LT DREYSSE H EUGENE J
Citation
X. Kang et al., MOLECULAR-DYNAMICS SIMULATION OF THE INTERACTION OF ENERGETIC CLUSTERS WITH THIN-FILMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 122(3), 1997, pp. 339-342
Citations number
10
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
122
Issue
3
Year of publication
1997
Pages
339 - 342
Database
ISI
SICI code
0168-583X(1997)122:3<339:MSOTIO>2.0.ZU;2-4
Abstract
We report on molecular dynamics simulations of the impact of a cluster on a free-standing thin film, The system's evolution is tracked as a function of initial cluster temperature and impact velocity, the subst rate initially being kept at absolute zero, We observe various phenome na, including deposition, wetting, implantation of the cluster into th e film, and perforation of the film by the cluster. A ''phase diagram' ' of the resulting configuration as a function of the collision parame ters is outlined.