C. Illgner et al., LATERAL AND DEPTH PROFILES OF NITROGEN IN LASER-NITRIDED IRON, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 122(3), 1997, pp. 420-422
The effect of nitrogen take-up upon irradiation of iron or steel with
excimer laser pulses in air or nitrogen atmosphere is well established
. However, the influence of the laser parameters (energy density, time
structure, wavelength, number of pulses) on the nitrogen profile is n
ot yet understood. We used Resonant Nuclear Reaction Analysis to inves
tigate the evolution of nitrogen profiles with the number of pulses, T
o improve the accuracy of the nitrogen profiling, the laser irradiatio
n was carried out in a N-15(2) enriched atmosphere. This allowed to de
tect also very low nitrogen concentrations that made it possible to fo
llow the development of the nitrogen depth profiles from 1 to 64 pulse
s and to resolve the lateral nitrogen profiles across the laser spot.
The laser induced surface morphology was observed with optical microsc
opy and a surface profilometer.