REACTION OF AL WITH AMMONIA BY PULSED-LASER ABLATION - OPTICAL ANALYSIS AND MASS-SPECTROMETRY

Authors
DIPALMA TM FLAMINI C ORLANDO S TEGHIL R GUIDONI AG MELE A
Citation
Tm. Dipalma et al., REACTION OF AL WITH AMMONIA BY PULSED-LASER ABLATION - OPTICAL ANALYSIS AND MASS-SPECTROMETRY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 122(3), 1997, pp. 423-426
Citations number
10
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
122
Issue
3
Year of publication
1997
Pages
423 - 426
Database
ISI
SICI code
0168-583X(1997)122:3<423:ROAWAB>2.0.ZU;2-Y
Abstract
In situ techniques have been employed to characterize laser plasma (pl ume) formation and reactions in the gas cloud formed from Al and NH3, Optical emission imaging and spectroscopy, and time of flight mass spe ctrometry have been used to monitor ablation plume components. AlN fil ms have been synthesized by reaction of laser evaporated Al in a NH3 a tmosphere. Optical multichannel emission spectroscopy (OMA) and intens ified charge coupled device (ICCD) imaging have been applied to identi fication of the deposition precursors occurring in the plasma.