MODIFICATION OF SOL-GEL TIO2 PLANAR WAVE-GUIDES BY XE+ IRRADIATION

TiO2 sol-gel optical waveguides were prepared by multi dip-coating. Th ey were heat treated at 500 degrees C and irradiated by Xe+ ions. The implantation energy, in the MeV range, was chosen to assure a total en ergy deposition inside the waveguide. Additionally, after implantation , annealing treatment was performed at 200 degrees C under pure oxygen flux. The structural changes were examined by Raman spectroscopy and Transmission Electron Microscopy (TEM), and the waveguide properties w ere investigated by m-line spectroscopy. Significant densification of the layers and refractive index enhancement were obtained, while a str ong decrease of the crystallite size was observed in the film.