MINIATURIZED SURFACE-DRIVEN ELECTROSTATIC ACTUATORS - DESIGN AND PERFORMANCE EVALUATION

Authors
GAO RX FANG J RAO B WARRINGTON RO
Citation
Rx. Gao et al., MINIATURIZED SURFACE-DRIVEN ELECTROSTATIC ACTUATORS - DESIGN AND PERFORMANCE EVALUATION, IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2(1), 1997, pp. 1-7
Citations number
18
Categorie Soggetti
Controlo Theory & Cybernetics","Robotics & Automatic Control","Engineering, Manufacturing","Engineering, Mechanical","Engineering, Eletrical & Electronic
Journal title
IEEE-ASME TRANSACTIONS ON MECHATRONICS → ACNP
ISSN journal
10834435
Volume
2
Issue
1
Year of publication
1997
Pages
1 - 7
Database
ISI
SICI code
1083-4435(1997)2:1<1:MSEA-D>2.0.ZU;2-O
Abstract
A series of miniaturized, surface-driven rotary and linear electrostat ic actuators was designed and fabricated, Finite element analysis meth od was used to aid in the design and analysis of the electrostatic dri ve mechanism, The actuators, consisting mainly of a copper-coated 200- mu m-thick glass epoxy stator board and a 34-mu m-thick carbon-coated polyethyleneterephthalate (PET) film slider, were fabricated using mod ified printed circuit board (PCB) techniques, These actuators, able to carry mechanical loads up to 375 times their own weight, can be used as micro conveyers or robots in an automated micromachine assembly env ironment for a wide range of applications.