LASER AND THERMAL-PROCESSING FOR TILINBO3 WAVE-GUIDE FABRICATION

Citation
M. Bertolotti et al., LASER AND THERMAL-PROCESSING FOR TILINBO3 WAVE-GUIDE FABRICATION, Applied physics. A, Solids and surfaces, 56(4), 1993, pp. 349-351
Citations number
11
ISSN journal
07217250
Volume
56
Issue
4
Year of publication
1993
Pages
349 - 351
Database
ISI
SICI code
0721-7250(1993)56:4<349:LATFTW>2.0.ZU;2-Q
Abstract
Ti diffusion into LiNbO3 single crystal was studied as a result of Rub y laser irradiation of a metallic Ti thin film covering the crystal su rface and subsequent thermal processing in a furnace. Different regime s of irradiation and heating were used. SIMS analysis was employed for investigation of the treatment. The combined method used proved to be able to form waveguides of 3-4 mum thickness.