Submicron spatial resolution photoluminescence is used to assess radia
tive efficiency and spatial uniformity of GaN/InGaN heterojunctions. R
oom temperature photoluminescence of multiple InGaN quantum wells with
GaN barriers fabricated by electron-cyclotron resonance assisted mole
cular beam epitaxy was measured as a function of position on a facet p
erpendicular to the layer structure. Our high resolution studies revea
l that the radiative recombination for the InGaN quantum wells is 50-5
0 times more efficient than for the underlying GaN film. (C) 1997 Amer
ican Institute of Physics.