MICRON-SIZED CONTROL OF MOLECULAR-ORIENTATION - THIN-FILM DEPOSITION OF LIQUID-CRYSTALLINE POLYMER ON POLYIMIDE LAYER EXPOSED WITH A LINEARLY POLARIZED LASER

Linearly polarized laser chemical vapor deposition of liquid crystalli ne polymer was carried out on the polyimide layer which was exposed wi th a linearly polarized laser. We used ga(2-methylpropenoyloxy)hexylox y]-4'-cyanobiphenyl as a source of polymer film and a KrF excimer lase r as an UV laser light source. Before deposition, exposure to a polyim ide layer on a substrate was performed through a photomask. In both ex posed and nonexposed areas, the film was deposited during laser irradi ation. The molecular orientation of the film in the exposed area was p erpendicular to the polarization of the exposed laser beam while that in the nonexposed area was parallel to the polarization of a depositio n laser beam. (C) 1997 American Institute of Physics.