The density of states (DOS) near the Fermi level is studied for hydrog
enated amorphous silicon (a-Si: H) thin films using the space charge l
imited current technique (SCLC). Experiments using films of different
thicknesses show that surface states significantly contribute to the D
OS. Investigations of both front and back contacts indicate that the f
irst deposited layers imply DOS higher than the rest of the film. The
study also shows that the film characteristics are dominated by the,to
p electrode.