EFFECT OF RF POWER ON THE MICROSTRUCTURE OF A-SIH FILMS

Authors
AIDA MS MIROUH K
Citation
Ms. Aida et K. Mirouh, EFFECT OF RF POWER ON THE MICROSTRUCTURE OF A-SIH FILMS, Physica status solidi. a, Applied research, 136(1), 1993, pp. 31-33
Citations number
8
Journal title
Physica status solidi. a, Applied research → ACNP
ISSN journal
00318965
Volume
136
Issue
1
Year of publication
1993
Pages
31 - 33
Database
ISI
SICI code
0031-8965(1993)136:1<31:EORPOT>2.0.ZU;2-O