LOW-THRESHOLD VOLTAGE CONTINUOUS-WAVE VERTICAL-CAVITY SURFACE-EMITTING LASERS

Data are presented demonstrating a design and fabrication process for the realization of low-threshold, high-output vertical-cavity surface- emitting laser diodes with low series resistance. Lateral current conf inement is achieved in the laser structures through the use of molecul ar-beam epitaxial regrowth over a 1000-angstrom-thick patterned layer of low growth temperature AlGaAs incorporated into the p-type top mirr or. A maximum cw output power in excess of 5.7 mW, at 300 K is demonst rated for 15-mum-diam devices. With increased top mirror reflectivity (through the addition of dielectric layers), the low series resistance of the design results in a bias voltage of only 1.8 V at a threshold current of 1.9 mA for 10-mum-diam devices.