O. Albrektsen et al., TERRACING AND STEP BUNCHING IN INTERFACES OF MOLECULAR-BEAM EPITAXY-GROWN (AL)GAAS MULTILAYERS, Applied physics letters, 62(17), 1993, pp. 2105-2107
The growth terraces in molecular beam epitaxy-grown AlxGa1-xAs multila
yers are observed on the ultrahigh vacuum cleaved (110) cross-sectiona
l plane using scanning tunneling microscopy. Under regular growth cond
itions on 2-degrees off oriented vicinal surfaces, we observe step bun
ching of 2-8 atomic layers and a corresponding extension of the terrac
e length instead of monolayer steps. These results demonstrate that th
e roughness of quantum confinement layers can be studied down to the a
tomic scale in a direct way.