DEVELOPMENT OF A SCANNING REFLECTION ELECTRON-MICROSCOPE FOR INSITU OBSERVATION OF CRYSTAL-GROWTH

Authors
FUWA K YAMAMURO K YANAGIDA H SHIMIZU S
Citation
K. Fuwa et al., DEVELOPMENT OF A SCANNING REFLECTION ELECTRON-MICROSCOPE FOR INSITU OBSERVATION OF CRYSTAL-GROWTH, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 328(3), 1993, pp. 592-595
Citations number
7
Categorie Soggetti
Nuclear Sciences & Tecnology","Physics, Particles & Fields","Instument & Instrumentation",Spectroscopy
Journal title
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment → ACNP
ISSN journal
01689002
Volume
328
Issue
3
Year of publication
1993
Pages
592 - 595
Database
ISI
SICI code
0168-9002(1993)328:3<592:DOASRE>2.0.ZU;2-E
Abstract
A new type of scanning reflection electron microscope (SREM) has been developed in which RHEED spot intensities are captured by a very sensi tive television camera. SREM images can be easily obtained with a comp uter operating. The system was applied to observations of a surface of an Al thin film grown on Si(001) having an amorphous structure and to an in situ observation of the creation process of Ga droplets on GaAs (001).