STRUCTURAL EVALUATION OF A MO SI MULTILAYER, ANALYZED WITH VARIOUS WAVELENGTHS/

Authors
ITO Y MUKOYAMA T OMOTE K SHIMIZU K NISAWA A SHOJI T TERAUCHI H KUEHNER S
Citation
Y. Ito et al., STRUCTURAL EVALUATION OF A MO SI MULTILAYER, ANALYZED WITH VARIOUS WAVELENGTHS/, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 75(1-4), 1993, pp. 355-359
Citations number
10
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
75
Issue
1-4
Year of publication
1993
Pages
355 - 359
Database
ISI
SICI code
0168-583X(1993)75:1-4<355:SEOAMS>2.0.ZU;2-A
Abstract
A Mo/Si multilayer is synthesized and its structure is evaluated on an atomic scale using various soft X-rays (MgKalpha, FKalpha, OKalpha, a nd CKalpha). Two types of models based on the optical and diffraction methods were considered. It is found that the latter theory is more ef fective in extracting the multilayer structure.