APPLICATION OF PIXE AND RBS METHODS IN THE ANALYSIS OF THIN-FILMS OF HIGH-TC SUPERCONDUCTORS

The possibilities of the PIXE method in combination with the RBS metho d in the analysis of the high-T(c) superconducting thin films are disc ussed. The results obtained applying He-4 ions with energies up to 3.1 MeV in the bombardment of Y-Ba-Cu-O layers on selected substrata are presented. The heavy element concentrations are determined by the PIXE method using the yields of K(alpha) for Cu as well as Y, and L(alpha) for Ba. The quantitative analysis based on fundamental parameters as well as external standards have been applied. The content of heavy ele ments can be determined with an accuracy of about 2-3 rel.%. The oxyge n content was determined using 3.045 MeV resonance in (O(He, He)O)-O-1 6-He-4-He-4-O-16 elastic scattering with an accuracy of even 1 rel.%. The RBS method was used to determine the layer thickness as well as th e chemical composition. Finally. the comparison with ICP-AES, XRF and AAS methods is given.