TEXTURES OF TA AL MULTILAYER FILMS

Ta/Al multilayer films with a modulation wavelength of 7.0 nm were gro wn using magnetron sputtering. The Bragg theta-2theta scan pattern and the plate film photograph of x-ray diffraction reveal that the sample has Ta(110) and Al (111) axial textures with a mosaic spread of about +/- 5-degrees and coherency strains. The structure change of the mult ilayer sample after annealing at 550-degrees-C for 2 h is determined b y the plate film photography of x-ray diffraction to study the thermal stability. It is found that after annealing a large amount of Ta and Al atoms at the interfaces are combined into TaAl3 with [(202) + (002) ] textures.