Hitherto, theoretical models for MOSFET substrate current predicted th
at substrate current is a strong function of temperature. However, exp
erimental data presented in this and previous studies show that the ra
tio of substrate current to drain current is insensitive to temperatur
e over the range 77 to 300 K. We propose a modified model for an elect
ron mean-free path (MFP) in the substrate current based on the concept
of energy relaxation. The difference between the energy and momentum
relaxation MPF is clarified and the substrate current model with modif
ied MFP can explain the temperature dependence of the substrate curren
t.