THERMAL EXTRACTION BEHAVIOR OF HE AND D FROM HE-IMPLANTED YTTRIUM-IRON-GARNET ANNEALED IN D(2)()

Thermal extraction behavior of He and D from He+-implanted yttrium iro n garnet (Y3Fe5O12 or YIG) thin films annealed in D2 and activation en ergies of He and D in each trapping state have been investigated by me ans of a thermal desorption mass spectrometric (TDS) technique in orde r to clarify the effect of hydrogen on the effective anisotropy field change induced by ion implantation followed by D2 annealing. Four trap ping states of He in He+-implanted YIG were observed when it was annea led under T(a)=320-degrees-C at a constant pressure of 760 Torr. The r esidual He atoms shifted to stabler states when it was annealed at abo ve T(a)=350-degrees-C. Two trapping states of diffused D atoms which w ere extracted as a form of D2O were observed for two kinds of YIG samp les annealed in D2 atmosphere. The relationship between effective anis otropy field change induced by ion implantation and the thermal extrac tion behavior of He and D was discussed against the annealing temperat ure.