Ky. Kim et al., STRUCTURAL AND ELECTRICAL-PROPERTIES OF LEAD-ZIRCONATE-TITANATE THIN-FILMS PREPARED BY MULTITARGET REACTIVE DC MAGNETRON COSPUTTERING, JPN J A P 1, 32(4), 1993, pp. 1700-1707
We have investigated the structural and electrical properties of lead-
zirconate-titanate (PZT) thin films prepared on Pt/Ti/SiO2/Si substrat
es by multitarget reactive DC magnetron cosputtering. Film composition
has been controlled by independently varying the DC power applied to
the Pb, Zr and Ti targets. A single perovskite phase with a pseudocubi
c structure has been obtained with postannealing at 550-degrees-C in o
xygen. The structure, composition and chemical state have been examine
d as a function of annealing temperature. The 0.65 mum- and 2.1 mum-th
ick films annealed at 550-degrees-C have dielectric constants of 178 a
nd 497 at 100 kHz, remanent polarizations of 1.7 muC/cm2 and 2.4 muC/c
m2 and coercive fields of 7.8 kV/cm and 8.4 kV/cm, respectively.