IS A SCANNER BETTER THAN A STEPPER

Authors
ARNOLD WH
Citation
Wh. Arnold, IS A SCANNER BETTER THAN A STEPPER, Solid state technology, 40(3), 1997, pp. 77
Citations number
23
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
40
Issue
3
Year of publication
1997
Database
ISI
SICI code
0038-111X(1997)40:3<77:IASBTA>2.0.ZU;2-K
Abstract
Quarter micron optical lithography introduced step-and-scan tools to I C manufacturing. While scanning lithography has a few obvious advantag es, including larger image fields and scan averaging of aberrations, t he scanner also suffers from increased system complexity and cost, syn chronization, and vibration errors, and, in cases where the full field size is not used, reduced throughput.