Using nuclear-physical and physical methods, we investigate the modifi
cation process along the penetration depth of a low energy high curren
t electron beam. The analysis of the defect structure shows vacancy cl
usters (divacancies, trivacancies, loops) and an increased dislocation
density in this modified layer. Computer calculations show that the t
hickness of the melted layer increases with the energy flow density an
d that the energy flow density determines the boundaries of the direct
heat attack of a high current electron beam. The increased hardness o
f the modified layer is related to the increased dislocation density.