DEVICE FOR DEPOSITING MULTICOMPONENT THIN-FILMS OF VARIABLE COMPOSITION

Authors
BOIKO EB KOMAROV FF SOLOVEV VS TISHKOV VS
Citation
Eb. Boiko et al., DEVICE FOR DEPOSITING MULTICOMPONENT THIN-FILMS OF VARIABLE COMPOSITION, Instruments and experimental techniques, 35(5), 1992, pp. 937-938
Citations number
10
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Instruments and experimental techniques → ACNP
ISSN journal
00204412
Volume
35
Issue
5
Year of publication
1992
Part
2
Pages
937 - 938
Database
ISI
SICI code
0020-4412(1992)35:5<937:DFDMTO>2.0.ZU;2-D
Abstract
The article is devoted to the description of a new target unit of a de vice for growing multicomponent thin films of variable composition in a vacuum by an ion-beam sputtering of the target.