CO2-LASER ANNEALING OF AL A-SI-H CONTACT

Authors
GLESKOVA H ILCHENKO VV SKRYSHEVSKY VA STRIKHA VI
Citation
H. Gleskova et al., CO2-LASER ANNEALING OF AL A-SI-H CONTACT, Czechoslovak journal of Physics, 43(2), 1993, pp. 169-178
Citations number
21
Categorie Soggetti
Physics
Journal title
Czechoslovak journal of Physics → ACNP
ISSN journal
00114626
Volume
43
Issue
2
Year of publication
1993
Pages
169 - 178
Database
ISI
SICI code
0011-4626(1993)43:2<169:CAOAAC>2.0.ZU;2-K
Abstract
The paper concerns the possibility of using CW (continuous wave) CO2-l aser annealing (lambda = 10.6 mum, P less-than-or-equal-to 100 W/cm2) for formation of a barrier in the Al/a-Si:H/SS (SS -stainless steel) s tructures with good rectifying I-V characteristics. The infrared absor ption spectra, photoelectric properties, temperature effect on the con ductivity and saturation current were analyzed and various contact mod els are discussed.