EXACT ANALYTICAL SOLUTIONS AND CLOSE APPROXIMATIONS TO THE DEPTH DISTRIBUTION FUNCTION IN AES AND XPS

Authors
DWYER VM RICHARDS JM
Citation
Vm. Dwyer et Jm. Richards, EXACT ANALYTICAL SOLUTIONS AND CLOSE APPROXIMATIONS TO THE DEPTH DISTRIBUTION FUNCTION IN AES AND XPS, Surface and interface analysis, 20(4), 1993, pp. 271-275
Citations number
19
Categorie Soggetti
Chemistry Physical
Journal title
Surface and interface analysis → ACNP
ISSN journal
01422421
Volume
20
Issue
4
Year of publication
1993
Pages
271 - 275
Database
ISI
SICI code
0142-2421(1993)20:4<271:EASACA>2.0.ZU;2-X
Abstract
This paper presents an analysis of the form of the depth distribution function (DDF) for one of the only scattering cross-sections for which a solution to the Boltzmann transport equation (BTE) is readily avail able. In doing so we demonstrate how different approximations lead to DDFs of differing complexity. The possibility of achieving the require ment for quantitative AES and XPS of a simple yet accurate DDF is disc ussed.