A SELF-CONTAINED MODELING AND EXPERIMENTAL-STUDY OF SURFACE-WAVE PRODUCED ARGON DISCHARGES IN A COAXIAL SETUP WITH A CENTRAL METALLIC CYLINDER .1. MODELING

We present a self-contained theoretical description of azimuthally sym metric surface wave (SW) sustained discharges in argon at low pressure in a coaxial setup with a central cylinder. The model is based on a c omplete set of equations, including the homogeneous Boltzmann equation , Maxwell's equations, and the continuity and the momentum transfer eq uations for electrons and ions. The radially inhomogeneous plasma is d escribed as a lossy dielectric medium with a complex permittivity. The above formulation provides a complete, self-contained description of the spatial distributions of the SW sustaining field and the plasma de nsity, of the wave dispersion relation, and of the power transfer from the wave to the plasma. The theoretical results are compared to exper imental data from absolute electric and magnetic field measurements an d Langmuir probe and spectroscopic diagnostics, in an accompanying exp erimental paper.