Te. Sheridan, EVOLUTION OF THE ION DISTRIBUTION FUNCTION FOR AN EXPANDING SHEATH WITH COLLISIONS, Plasma sources science & technology, 6(1), 1997, pp. 91-95
A theory describing the temporal evolution of the ion energy distribut
ion function at a planar electrode for an expanding plasma sheath with
charge-exchange collisions is presented. The theory spans the entire
range of ion collisionality, from collisionless to fully collisional.
Good agreement is found with fluid theory in the collisionless and col
lisionally dominated regimes.