EVOLUTION OF THE ION DISTRIBUTION FUNCTION FOR AN EXPANDING SHEATH WITH COLLISIONS

Authors
SHERIDAN TE
Citation
Te. Sheridan, EVOLUTION OF THE ION DISTRIBUTION FUNCTION FOR AN EXPANDING SHEATH WITH COLLISIONS, Plasma sources science & technology, 6(1), 1997, pp. 91-95
Citations number
12
Categorie Soggetti
Phsycs, Fluid & Plasmas
Journal title
Plasma sources science & technology → ACNP
ISSN journal
09630252
Volume
6
Issue
1
Year of publication
1997
Pages
91 - 95
Database
ISI
SICI code
0963-0252(1997)6:1<91:EOTIDF>2.0.ZU;2-#
Abstract
A theory describing the temporal evolution of the ion energy distribut ion function at a planar electrode for an expanding plasma sheath with charge-exchange collisions is presented. The theory spans the entire range of ion collisionality, from collisionless to fully collisional. Good agreement is found with fluid theory in the collisionless and col lisionally dominated regimes.