ATOM-PROBE ANALYSIS OF A NANOCRYSTALLINE FE-C-TA SPUTTERED SOFT MAGNETIC THIN-FILM

Sputtered Fe-10.3at%C-8.3at%Ta magnetic thin films annealed below 650- degrees-C were analyzed by the atom probe method in order to elucidate the mechanism of formation of the nanocrystalline structure. In the a s-deposited amorphous film, evidence for significant variation of the carbon concentration was found. By annealing below the crystallization temperature, the degree of fluctuation of the carbon concentration ap peared to be enhanced. After heat treatment for optimum soft magnetic properties, TaC was observed. In this condition, substantial amounts o f supersaturated C and Ta were still dissolved in the alpha-Fe phase.