CONTROLLED APERTURE ATOM-PROBE DESIGN AND APPLICATIONS

Authors
DANOIX F BOUET M PAREIGE P MENAND A
Citation
F. Danoix et al., CONTROLLED APERTURE ATOM-PROBE DESIGN AND APPLICATIONS, Applied surface science, 67(1-4), 1993, pp. 451-458
Citations number
15
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
67
Issue
1-4
Year of publication
1993
Pages
451 - 458
Database
ISI
SICI code
0169-4332(1993)67:1-4<451:CAADAA>2.0.ZU;2-1
Abstract
In this paper, some of the backdraws resulting from the evolution of t he lateral resolution during atom probe analysis are presented, with p articular emphasis on statistical analysis and depth calibration. The use of a variable aperture iris, devoted to maintain a constant latera l resolution, is described. The advantages of using a constant and cal ibrated lateral resolution during analysis are demonstrated on the bas is of some selected metallurgical applications.