HYDROGEN ANALYSIS IN CRSIO THIN-FILMS

Authors
NEELMEIJER C SOBE G
Citation
C. Neelmeijer et G. Sobe, HYDROGEN ANALYSIS IN CRSIO THIN-FILMS, Journal of radioanalytical and nuclear chemistry, 175(5), 1993, pp. 389-392
Citations number
4
Categorie Soggetti
Chemistry Inorganic & Nuclear","Chemistry Analytical","Nuclear Sciences & Tecnology
Journal title
Journal of radioanalytical and nuclear chemistry → ACNP
ISSN journal
02365731
Volume
175
Issue
5
Year of publication
1993
Pages
389 - 392
Database
ISI
SICI code
0236-5731(1993)175:5<389:HAICT>2.0.ZU;2-Q
Abstract
H-concentrations of more than 10 at% have been obtained in CrSiO films when deposited by r.f. diode sputtering with cermet targets. No hydro gen was detectable within analogous layers produced by reactive magnet ron coating within the same apparatus. The different electrical proper ties measured for both layer types we partly refer to the presence of the H-contaminants.