HEAVY-ION MICROPROBES AND THEIR APPLICATIONS

Authors
TAKAI M HORINO Y MOKUNO Y CHAYAHARA A KIUCHI M FUJII K SATOU M
Citation
M. Takai et al., HEAVY-ION MICROPROBES AND THEIR APPLICATIONS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 77(1-4), 1993, pp. 8-16
Citations number
37
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
77
Issue
1-4
Year of publication
1993
Pages
8 - 16
Database
ISI
SICI code
0168-583X(1993)77:1-4<8:HMATA>2.0.ZU;2-3
Abstract
Nuclear microprobes with heavy ions have considerable advantage over l ight ion microprobes. Features of heavy ion microprobes such as larger scattering cross section and larger stopping power than those for lig ht ion microprobes, and capability of in-situ localized modification a nd simulating single event upsets in both microelectronic circuits and biological specimens, are discussed in comparison with light ion micr oprobes. Some of the recent installations of heavy ion microprobes and their applications are also reviewed.