DESIGN OF A COMPACT NUCLEAR MICROPROBE SYSTEM WITH A LIQUID-METAL ION-SOURCE

Authors
TAKAI M MIMURA R SAWARAGI H AIHARA R
Citation
M. Takai et al., DESIGN OF A COMPACT NUCLEAR MICROPROBE SYSTEM WITH A LIQUID-METAL ION-SOURCE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 77(1-4), 1993, pp. 25-28
Citations number
10
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
77
Issue
1-4
Year of publication
1993
Pages
25 - 28
Database
ISI
SICI code
0168-583X(1993)77:1-4<25:DOACNM>2.0.ZU;2-Y
Abstract
A compact nuclear microprobe system with a short acceleration-column o f 200 kV and a liquid metal ion source of lithium and beryllium, havin g a size of a conventional SEM system, has been designed and is being constructed. An ultrahigh-vacuum sample chamber with a three-axis goni ometer, a toroidal analyzer and a solid state detector for channeling, MEIS, and RBS analyses is connected to the acceleration column. A min imum beam spot size of less than 50 nm with a current of 50 pA is esti mated by optical property calculation for 200 keV Li+ LMIS. The beam s pot size estimated is feasible with a minimum feature size of future g igabit memory ICs.