MICRO-RBS ANALYSIS USING A TOROIDAL ELECTROSTATIC ANALYZER

Authors
KINOMURA A ANDOH H TAKAI M
Citation
A. Kinomura et al., MICRO-RBS ANALYSIS USING A TOROIDAL ELECTROSTATIC ANALYZER, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 77(1-4), 1993, pp. 140-143
Citations number
7
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
77
Issue
1-4
Year of publication
1993
Pages
140 - 143
Database
ISI
SICI code
0168-583X(1993)77:1-4<140:MAUATE>2.0.ZU;2-S
Abstract
A toroidal electrostatic analyzer was Installed in a microbeam line fo r local backscattering analysis with high energy resolution and simult aneous detection of angular ion distributions. The secondary electron image of gold patterns on silicon could be obtained with a minimum spo t size of 8 x 8 mum2. The energy resolution of the toroidal analyzer s lightly decreased with the decrease in the spot size. Changes in probe position gave rise to energy shifts of leading edges in RBS spectra.